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Dependence of film thickness on nitrogen ion energy and substrate temperature for titanium nitride films on stainless steel using an ion beam assisted deposition technique

✍ Scribed by Katsuhiro Yokota; Susumu Tamura; Kazuhiro Nakamura; Motohiro Horiguchi; Hiroki Nakaiwa; Takashi Sugimoto; Katsuya Akamatsu; Kazuyoshi Nakao

Book ID: 114172078
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 209 KB
Volume: 166-167
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(99)01058-7

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