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Nucleation of point defects in low-fluence ion-implanted GaAs and GaP

✍ Scribed by W. Wesch; E. Wendler; K. Gärtner


Book ID
113282648
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
417 KB
Volume
63
Category
Article
ISSN
0168-583X

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Defects in H implanted GaAs studied by i
✍ J. Keinonen; E. Rauhala; J. Räisänen; K. Saarinen; P. Hautojärvi; C. Corbel 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 260 KB

Ion-beam and low-energy positron-beam techniques have been used to study damage and implanted ion distributions and their annealing behavior in semi-insulating GaAs after the room temperature implantation of 3 × 10~-1 x 10 ~7 60 keV H' cm -'. The redistribution of the implanted H during annealing wa