✦ LIBER ✦
Observation of unequal densities for sulfur defects in silicon predeposited by low fluence ion implantation*
✍ Scribed by D. R. Myers; W. E. Phillips
- Book ID
- 112811878
- Publisher
- Springer US
- Year
- 1979
- Tongue
- English
- Weight
- 264 KB
- Volume
- 8
- Category
- Article
- ISSN
- 0361-5235
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