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Nucleation kinetics during homoepitaxial growth of TiN(001) by reactive magnetron sputtering

✍ Scribed by Wall, Marcel A.; Cahill, David G.; Petrov, I.; Gall, D.; Greene, J. E.

Book ID: 126954280
Publisher: The American Physical Society
Year: 2004
Tongue: English
Weight: 812 KB
Volume: 70
Category: Article
ISSN: 1098-0121
DOI: 10.1103/physrevb.70.035413

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