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Nanostructure formation during deposition of TiN/SiNx nanomultilayer films by reactive dual magnetron sputtering

โœ Scribed by Soderberg, Hans; Oden, Magnus; Molina-Aldareguia, Jon M.; Hultman, Lars

Book ID
118749720
Publisher
American Institute of Physics
Year
2005
Tongue
English
Weight
612 KB
Volume
97
Category
Article
ISSN
0021-8979

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