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Epitaxial growth and superhardness effect of TiN/AlON nanomultilayers synthesized by reactive magnetron sputtering technology

✍ Scribed by Ming Kong; Xiaoyan Wu; Bilong Huang; Geyang Li


Book ID
116605203
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
348 KB
Volume
485
Category
Article
ISSN
0925-8388

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