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Kinetic properties of TiN thin films prepared by reactive magnetron sputtering

✍ Scribed by Solovan, M. N.; Brus, V. V.; Maryanchuk, P. D.; Kovalyuk, T. T.; Rappich, J.; Gluba, M.

Book ID: 121356459
Publisher: SP MAIK Nauka/Interperiodica
Year: 2013
Tongue: English
Weight: 355 KB
Volume: 55
Category: Article
ISSN: 1063-7834
DOI: 10.1134/S1063783413110255

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