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Nucleation, growth and dissolution of extended defects in implanted Si: impact on dopant diffusion

✍ Scribed by A. Claverie; L.F. Giles; M. Omri; B. de Mauduit; G. Ben Assayag; D. Mathiot


Book ID
114170587
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
773 KB
Volume
147
Category
Article
ISSN
0168-583X

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