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NRA and RBS analyses of silicon, aluminium and iron nitride thin films

✍ Scribed by F.C. Stedile; R. Hübler; I.J.R. Baumvol; W.H. Schreiner; F.L. Freire Jr.

Book ID: 113283032
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 347 KB
Volume: 64
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(92)95572-9

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