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Analysis of dielectric nitride thin films by NRA, RBS and X-ray diffraction

✍ Scribed by F.C. Stedile; I.J. Baumvol; W.H. Schreiner; F.L. Freire Jr.

Book ID
113284028
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
475 KB
Volume
79
Category
Article
ISSN
0168-583X

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