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Characterisation of thin sputtered silicon nitride films by NRA, ERDA, RBS and SEM

✍ Scribed by A. Markwitz; H. Baumann; E. F. Krimmel; K. Bethge; P. Misaelides

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

NRA and RBS analyses of silicon, alumini

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Analysis of dielectric nitride thin film

✍ F.C. Stedile; I.J. Baumvol; W.H. Schreiner; F.L. Freire Jr. 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 475 KB

The use of HI-ERDA/RBS and NRA/RBS to de

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Deposition and DC electrical characteris

✍ R.D. Gould; S.A. Awan 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 150 KB

Preparation of silicon carbide nitride t

✍ Xiaofeng Peng; Lixin Song; Jia Meng; Yuzhi Zhang; Xingfang Hu 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 121 KB

Optical characterisation of silicon nitr

✍ Gianfranco Claudio; Sonya Calnan; Kevin Bass; Matt Boreland 📂 Article 📅 2007 🏛 Springer US 🌐 English ⚖ 362 KB