The use of HI-ERDA/RBS and NRA/RBS to depth profile N in GaAs1−xNx thin films

✍ Scribed by R.W. Smith; J. Plaza; D. Ghita; M. Sánchez; B.J. García; A. Muñoz-Martín; A. Climent-Font

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 144 KB
• Volume: 266
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2008.01.024