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Characterization of titanium-aluminum nitride thin films by ion beam techniques and X-ray diffraction

✍ Scribed by FC Stedile; FL Freire Jr; WH Schreiner; IJR Baumvol

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 708 KB
Volume: 45
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(94)90317-4

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