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Noval detection scheme for the analysis of hydrogen and helium by secondary ion mass spectrometry

✍ Scribed by H. Gnaser; H. Oechsner

Publisher
John Wiley and Sons
Year
1991
Tongue
English
Weight
289 KB
Volume
17
Category
Article
ISSN
0142-2421

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✦ Synopsis

Abstract

For the analysis of hydrogen and helium in solids and thin films by secondary ion mass spectrometry, the use of Cs^+^ primary ions in conjunction with the detection of HCs^+^ and HeCs^+^ molecular ions is proposed. For both species, detection limits of the order of 10^19^ atoms cm^−3^ are obtained at sputter removal retes of ∼1 nm s^−1^. A relative depth resolution of ∼2% is demonstrated for hydrogenated amorphous Is layers on single‐crystal Si. In these specimens, the HCs^+^ intensities scale linearly with the hydrogen concentrations c~H~ in the range investigated (c~H~ < 20at.%); hence, a quantitative evaluation of the H content appears possible by means of a single standard.

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