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Analysis of zinc selenide by secondary ion mass spectrometry: Relative sensitivity factors and detection limits

✍ Scribed by Steven J. Pachuta; Terry L. Smith

Publisher
John Wiley and Sons
Year
1992
Tongue
English
Weight
360 KB
Volume
18
Category
Article
ISSN
0142-2421

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✦ Synopsis

Abstract

SIMS relative sensitivity factors and detection limits are reported for seventeen elements in epitaxially‐grown ZnSe on GaAs, using oxygen and cesium primary ion beams. Analytical considerations necessary for obtaining the lowest detection limits are discussed.

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