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Nondestructive topographic resistivity evaluation of semi-insulating SiC substrates

✍ Scribed by R. Stibal; S. Müller; W. Jantz; G. Pozina; B. Magnusson; A. Ellison

Book ID: 104556383
Publisher: John Wiley and Sons
Year: 2003
Tongue: English
Weight: 476 KB
Volume: 0
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.200306237

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