Nitridation of atomic-layer-deposited HfO2/Al2O3 stacks by NH3 annealing

✍ Scribed by Liu, Jian-Shuang; Geng, Yang; Chen, Lin; Sun, Qing-Qing; Zhou, Peng; Lu, Hong-Liang; Zhang, David Wei

• Book ID: 121426253
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 798 KB
• Volume: 529
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2012.03.066