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Niobium oxide thin films formed by plasma immersion oxygen ion implantation

✍ Scribed by W. Ensinger; J. Hartmann; H. Bender; R.W. Thomae; A. Königer; B. Stritzker; B. Rauschenbach


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
561 KB
Volume
85
Category
Article
ISSN
0257-8972

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