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Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures

โœ Scribed by W. Ensinger; K. Volz; K. Baba; R. Hatada


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
423 KB
Volume
257
Category
Article
ISSN
0168-583X

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Correlations between process parameters
โœ W. Ensinger ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 830 KB

Plasma immersion ion implantation with hydrocarbon gases (HC-PIII) leads to both carbon implantation and carbon thin film deposition. The films are diamond-like carbon (DLC), mostly amorphous carbon with hydrogen (a-C:H). In the present review, examples from the literature on the deposition of HC-PI