Correlations between process parameters
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W. Ensinger
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Article
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2009
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Elsevier Science
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English
โ 830 KB
Plasma immersion ion implantation with hydrocarbon gases (HC-PIII) leads to both carbon implantation and carbon thin film deposition. The films are diamond-like carbon (DLC), mostly amorphous carbon with hydrogen (a-C:H). In the present review, examples from the literature on the deposition of HC-PI