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Characterization of Pt oxide thin film fabricated by plasma immersion ion implantation

✍ Scribed by Yi-Chan Chen; Yu-Ming Sun; Shih-Ying Yu; Chang-Po Hsiung; Jon-Yiew Gan; Chwung-Shan Kou


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
255 KB
Volume
237
Category
Article
ISSN
0168-583X

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