An alternative method for measuring flat
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A Benfdila; A Chikouche
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Article
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1999
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Elsevier Science
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English
โ 102 KB
The present paper describes an experimental method that can be used to measure the flatband voltage value in MOS devices. The method is based on the detection of the non-steady-state / steady-state transition of the surface potential at the Si-SiO interface when it is pulsed by a voltage signal. Thi