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New electroforming technology pressure aid for LIGA process

โœ Scribed by T.-H. Tsai; H. Yang; R. Chein

Book ID
106184727
Publisher
Springer-Verlag
Year
2004
Tongue
English
Weight
672 KB
Volume
10
Category
Article
ISSN
0946-7076

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Electroforming of microstructures is an important method for manufacturing sensors and actuators within the LIGA process and for their integration into microsystems The LIGA technique, shown in Fig 1, allows microstructures of almost any lateral shape to be fabricated with structural heights of seve