New microelectrodes for the investigatio
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K. Leyendecker; W. Bacher; W. Stark; A. Thommes
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Article
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1994
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Elsevier Science
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English
โ 390 KB
Electroforming of microstructures is an important method for manufacturing sensors and actuators within the LIGA process and for their integration into microsystems The LIGA technique, shown in Fig 1, allows microstructures of almost any lateral shape to be fabricated with structural heights of seve