New microelectrodes for the investigation ofthe electroforming of liga microstructures

✍ Scribed by K. Leyendecker; W. Bacher; W. Stark; A. Thommes

• Book ID: 103067039
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 390 KB
• Volume: 39
• Category: Article
• ISSN: 0013-4686
• DOI: 10.1016/0013-4686(94)e0028-x

✦ Synopsis

Electroforming of microstructures is an important method for manufacturing sensors and actuators within the LIGA process and for their integration into microsystems The LIGA technique, shown in Fig 1, allows microstructures of almost any lateral shape to be fabricated with structural heights of several hundred micrometers, lateral dimensions down to one micrometer, and submicron accuracy over the total height of the structure [1][2][3] In the electroforming step, small gaps as well as large structures on one substrate have to be filled Metal Depssift

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"~~~i~~11111 Fig 1 Process steps of the LIGA technique 0013-46g6(94)E0028-R