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Microcomposite electroforming for LIGA technology

✍ Scribed by M.-C. Chou; H. Yang; S.-H. Yeh

Book ID
106186215
Publisher
Springer-Verlag
Year
2001
Tongue
English
Weight
234 KB
Volume
7
Category
Article
ISSN
0946-7076

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Electroforming of microstructures is an important method for manufacturing sensors and actuators within the LIGA process and for their integration into microsystems The LIGA technique, shown in Fig 1, allows microstructures of almost any lateral shape to be fabricated with structural heights of seve