Micromachining of electroformed nickel mold using thick photoresist microstructure for imprint technology

✍ Scribed by Takayuki Shibata; Yoichi Takahashi; Takahiro Kawashima; Toshio Kubota; Mamoru Mita; Takashi Mineta; Eiji Makino

• Book ID: 106185395
• Publisher: Springer-Verlag
• Year: 2008
• Tongue: English
• Weight: 303 KB
• Volume: 14
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-007-0501-3