✦ LIBER ✦
A new process to fabricate the electromagnetic stepping micromotor using LIGA process and surface sacrificial layer technology
✍ Scribed by F. Yi; L. Peng; J. Zhang; Y. Han
- Publisher
- Springer-Verlag
- Year
- 2001
- Tongue
- English
- Weight
- 519 KB
- Volume
- 7
- Category
- Article
- ISSN
- 0946-7076
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