## Homoepitaxial growth of 6H-SiC layers is performed at 1600Β°C using propane and silane as source gases. The influence of the growth parameters, temperature and gas concentrations on the growth rate is discussed. The films are examined by structural, optical and electrical characterization techni
β¦ LIBER β¦
New approach to rapid characterization of single-crystalline silicon carbide
β Scribed by M. G. Mynbaeva
- Book ID
- 111450602
- Publisher
- SP MAIK Nauka/Interperiodica
- Year
- 2010
- Tongue
- English
- Weight
- 188 KB
- Volume
- 36
- Category
- Article
- ISSN
- 1063-7850
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