A Soft Lithography Approach to the Fabrication of Nanostructures of Single Crystalline Silicon with Well-Defined Dimensions and Shapes

✍ Scribed by Y. Yin; B. Gates; Y. Xia

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 506 KB
• Volume: 12
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/1521-4095(200010)12:19<1426::aid-adma1426>3.0.co;2-b