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Negative oxygen vacancies in HfO[sub 2] as charge traps in high-k stacks

✍ Scribed by Gavartin, J. L.; MunÌoz Ramo, D.; Shluger, A. L.; Bersuker, G.; Lee, B. H.

Book ID: 120369435
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 443 KB
Volume: 89
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2236466

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