✦ LIBER ✦
Interfacial oxygen and nitrogen induced dipole formation and vacancy passivation for increased effective work functions in TiN/HfO[sub 2] gate stacks
✍ Scribed by Hinkle, C. L.; Galatage, R. V.; Chapman, R. A.; Vogel, E. M.; Alshareef, H. N.; Freeman, C.; Wimmer, E.; Niimi, H.; Li-Fatou, A.; Shaw, J. B.
- Book ID
- 121476647
- Publisher
- American Institute of Physics
- Year
- 2010
- Tongue
- English
- Weight
- 478 KB
- Volume
- 96
- Category
- Article
- ISSN
- 0003-6951
No coin nor oath required. For personal study only.