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NanoScale Quantitative Mechanical Property Mapping Using Peak Force Tapping Atomic Force Microscopy

✍ Scribed by Minne, SC; Hu, Y; Hu, S; Pittenger, B; Su, C

Book ID
120009651
Publisher
Cambridge University Press
Year
2010
Tongue
English
Weight
499 KB
Volume
16
Category
Article
ISSN
1431-9276

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## Abstract We are developing metrology for rapid, quantitative assessment of elastic properties with nanoscale spatial resolution. Atomic force acoustic microscopy (AFAM) methods enable measurements of modulus at either a single point or as a map of local property variations. The information obtai