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Nanoscale elastic-property measurements and mapping using atomic force acoustic microscopy methods

✍ Scribed by Hurley, D C; Kopycinska-Müller, M; Kos, A B; Geiss, R H

Book ID
121461285
Publisher
Institute of Physics
Year
2005
Tongue
English
Weight
335 KB
Volume
16
Category
Article
ISSN
0957-0233

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✍ D. C. Hurley; M. Kopycinska-Müller; A. B. Kos; R. H. Geiss 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 323 KB 👁 1 views

## Abstract We are developing metrology for rapid, quantitative assessment of elastic properties with nanoscale spatial resolution. Atomic force acoustic microscopy (AFAM) methods enable measurements of modulus at either a single point or as a map of local property variations. The information obtai