Quantitative Elastic-Property Measurements at the Nanoscale with Atomic Force Acoustic Microscopy

✍ Scribed by D. C. Hurley; M. Kopycinska-Müller; A. B. Kos; R. H. Geiss

• Publisher: John Wiley and Sons
• Year: 2005
• Tongue: English
• Weight: 323 KB
• Volume: 7
• Category: Article
• ISSN: 1438-1656
• DOI: 10.1002/adem.200500039

✦ Synopsis

Abstract

We are developing metrology for rapid, quantitative assessment of elastic properties with nanoscale spatial resolution. Atomic force acoustic microscopy (AFAM) methods enable measurements of modulus at either a single point or as a map of local property variations. The information obtained furthers our understanding of nanopatterned surfaces, thin films, and nanoscale structures.