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Nanoscale mechanical property measurements using modified atomic force microscopy

✍ Scribed by Ashok V. Kulkarni; B. Bhushan

Book ID
114086073
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
317 KB
Volume
290-291
Category
Article
ISSN
0040-6090

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## Abstract We are developing metrology for rapid, quantitative assessment of elastic properties with nanoscale spatial resolution. Atomic force acoustic microscopy (AFAM) methods enable measurements of modulus at either a single point or as a map of local property variations. The information obtai