Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It pro
Nanoimprint Lithography: A Processing Technique for Nanofabrication Advancement
✍ Scribed by Weimin Zhou,Guoquan Min,Jing Zhang,Yanbo Liu,Jinhe Wang…
- Book ID
- 126339782
- Publisher
- Nano-Micro Letters
- Year
- 2011
- Tongue
- English
- Weight
- 271 KB
- Volume
- 3
- Category
- Article
- ISSN
- 2311-6706
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Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It pro
Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It pro