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Lift-off process for nanoimprint lithography

✍ Scribed by P. Carlberg; M Graczyk; E.-L. Sarwe; I. Maximov; M. Beck; L. Montelius

Book ID
114155515
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
358 KB
Volume
67-68
Category
Article
ISSN
0167-9317

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