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Heat transfer analysis during a curing process for UV nanoimprint lithography

โœ Scribed by Insoo Park; Si-Hyung Lim; Donghoon Shin; Kee Sung Lee; Siyoul Jang; Hong Jae Yim; Chongjin Won; Jay I. Jeong


Book ID
107624603
Publisher
Springer-Verlag
Year
2009
Tongue
English
Weight
350 KB
Volume
23
Category
Article
ISSN
1738-494X

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