PECVD of amorphous hydrogenated oxygenat
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Steven F. Durrant; Mário A. Bica De Moraes
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Article
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1998
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John Wiley and Sons
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English
⚖ 202 KB
An actinometric optical emission spectroscopy (AOES) study of the trends in the concentrations of the plasma species H, CH, CO, OH, and CN in film-producing glow discharges of mixtures of isopropanol and nitrogen was undertaken. Conventional AOES was used to obtain the trends in the plasma concentra