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Nano-scratch resistance study of nitrogenated amorphous carbon films prepared by unbalanced magnetron sputtering

✍ Scribed by J.R. Shi; S.N. Piramanayagam

Book ID: 108184328
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 188 KB
Volume: 303
Category: Article
ISSN: 0304-8853
DOI: 10.1016/j.jmmm.2006.01.241

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