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Nano-Imprint Lithography Using Replicated Mold by Ni Electroforming

✍ Scribed by Hirai, Yoshihiko; Harada, Satoshi; Isaka, Satoshi; Kobayashi, Michio; Tanaka, Yoshio

Book ID: 127132418
Publisher: Institute of Pure and Applied Physics
Year: 2002
Tongue: English
Weight: 286 KB
Volume: 41
Category: Article
ISSN: 0021-4922
DOI: 10.1143/jjap.41.4186

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