Polymer microlens replication by Nanoimprint Lithography using proton beam fabricated Ni stamp

✍ Scribed by R.K. Dutta; J.A. van Kan; A.A. Bettiol; F. Watt

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 326 KB
• Volume: 260
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2007.02.064