Micro lens imprinted on Pyrex glass by using amorphous Ni–P alloy mold
✍ Scribed by Harutaka Mekaru; Tomoyuki Tsuchida; Jun-ichi Uegaki; Manabu Yasui; Michiru Yamashita; Masaharu Takahashi
- Book ID
- 104051905
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 701 KB
- Volume
- 85
- Category
- Article
- ISSN
- 0167-9317
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✦ Synopsis
We fabricated micro lenses on a Pyrex glass using thermal nanoimprint technology. The mold material employed to imprint on the Pyrex glass was a Ni/Ti/Si substrate electroless-plated with an amorphous Ni-P alloy. The fabrication of the mold involved high precision FIB processing. In this technique we used a newly developed low-cost mold for imprinting on Pyrex glass rather than using the commonly employed more expensive mold made of glass-like carbon material. Micro lens shaped concave curvatures of radii 12 lm and 20 lm were created on mold by an FIB system equipped with three-dimensional CAD software. The mold was then used for thermal imprinting on Pyrex glass substrate to fabricate lenses. The accuracy of Ni-P mold proved to be far superior to that of pure Ni mold.