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Multiscale Monte Carlo Simulation of Circular DC Magnetron Sputtering: Influence of Magnetron Design on Target Erosion and Film Deposition

✍ Scribed by Kwon, Ui Hui; Lee, Won Jong

Book ID: 121475542
Publisher: Institute of Pure and Applied Physics
Year: 2006
Tongue: English
Weight: 1023 KB
Volume: 45
Category: Article
ISSN: 0021-4922
DOI: 10.1143/JJAP.45.8629

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