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Influence of thickness on the crystallography and surface topography of TiN nano-films deposited by reactive DC and pulsed magnetron sputtering

✍ Scribed by I. Iordanova; P.J. Kelly; M. Burova; A. Andreeva; B. Stefanova

Book ID
113937644
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
913 KB
Volume
520
Category
Article
ISSN
0040-6090

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