Effect of flux clusterization on the thickness of films deposited by magnetron and pulsed laser sputtering of metal oxides

✍ Scribed by V. D. Okunev; S. J. Lewandowski; R. Szymczak; H. Szymczak; T. A. D’yachenko; V. A. Isaev; Yu. M. Nikolaenko; A. Abal’oshev; P. Gierłowski; H. Bielska-Lewandowska

• Book ID: 114992885
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2012
• Tongue: English
• Weight: 346 KB
• Volume: 38
• Category: Article
• ISSN: 1063-7850
• DOI: 10.1134/s1063785012030121