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Influence of the geometrical configuration on the plasma ionization distribution and erosion profile of a rotating cylindrical magnetron: a Monte Carlo simulation
✍ Scribed by Musschoot, J; Depla, D; Buyle, G; Haemers, J; Gryse, R De
- Book ID
- 121434486
- Publisher
- Institute of Physics
- Year
- 2006
- Tongue
- English
- Weight
- 940 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0022-3727
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