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Monte Carlo Calculation of Depth Distribution of Implanted Ions and Sputtering Yield. Comparison for Some of the Interaction Potentials

✍ Scribed by Szyszko, W. ;Sielanko, J.


Book ID
105381123
Publisher
John Wiley and Sons
Year
1989
Tongue
English
Weight
228 KB
Volume
112
Category
Article
ISSN
0031-8965

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