✦ LIBER ✦
Simple Monte-Carlo computer procedure for the sputtering and depth parameter determination of implanted ions in amorphous targets
✍ Scribed by Juliusz Sielanko; Witold Szyszko
- Publisher
- Elsevier Science
- Year
- 1985
- Weight
- 51 KB
- Volume
- 161
- Category
- Article
- ISSN
- 0167-2584
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