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Monte Carlo calculation of one- and two-dimensional particle and damage distributions for ion-implanted dopants in silicon

✍ Scribed by Albers, J.

Book ID: 114595289
Publisher: IEEE
Year: 1985
Tongue: English
Weight: 964 KB
Volume: 32
Category: Article
ISSN: 0018-9383
DOI: 10.1109/t-ed.1985.22225

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